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Hf0.3Zr0.7O2 film

Based on

4 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium zirconium oxide

Type Single Compound
Formula Hf0.3Zr0.7O2
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
adiabatic temperature change

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Applications

Area Application Nanomaterial Variant Source
energy storage

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
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Product

Hf0.3Zr0.7O2 film

Thickness: 9.2 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
See all (4)
  1. jfSKpM
Product

Hf0.3Zr0.7O2 film

Thickness: 9.2 nm

Medium: none

Support: TiN/SiO2/Si substrate

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
  1. Ot2qbkF
Product

Hf0.3Zr0.7O2 film

Thickness: ~ 9.2 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
Product

Hf0.3Zr0.7O2 film

Thickness: 12.4 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
Product

Hf0.3Zr0.7O2 film

RMS roughness: 1.1 nm

Thickness: ~ 9.2 nm

Medium/Support: none

References

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