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hafnium silicon oxynitride/titanium nitride/polysilicon trilayer

Based on

1 Articles
2015 Most recent source

Composition

1

hafnium silicon oxynitride

Type Single Compound
Formula HfSiON
Role layer
2

titanium nitride

Type Single Compound
Formula TiN
Role layer
3

polycrystalline silicon

poly silicon poly-silicon polysilicon poly-Si silicon pc-Si p-Si Si
Type Single Compound
Formula Si
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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