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negative e-beam resist/double-layered Au-Ta2O5 stacks/Au/Ta

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

gold

Type Single Compound
Formula Au
Role layer
3

tantalum pentoxide

tantalum(V) oxide tantalum oxide
Type Single Compound
Formula O5Ta2
Role partial layer
4

gold

Type Single Compound
Formula Au
Role layer
5

negative e-beam resist

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tantalum
  1. sXI0y3Zgb3eWgfmiUc
  2. IosgPDtOgDRc3lqY
Product

negative e-beam resist/double-layered Au-Ta2O5 stacks/Au/Ta

References

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