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gate/dielectric layer

Based on

1 Patents
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

highly doped silicon

Type Complex Compound
Formula
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

1,1,1,3,3,3-hexamethyldisilazane

bis(trimethylsilyl)amine trimethylsilyl moiety hexamethyl disilazane hexamethyldisilazane hexamethyldisilane HDMS HMDS
Type Single Compound
Formula C6H19NSi2
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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