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Si/silicon-rich SiNx/GST NW/sub>/SiNx

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich SiNx

Type Complex Compound
Formula
Role layer
2

Ge2Sb2Te5 nanowires

GST NW
Type Nano Material
Formula
Role partial layer
3

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role partial layer
4

tungsten

Type Single Compound
Formula W
Role partial layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
Product

Si/silicon-rich SiNx/GST NW/sub>/SiNx

Thickness: 100 nm

Thickness: 300 nm

Thickness: 70 nm

Wall height: 200 nm

Medium: none

Support: silicon

References

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