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silica/silicon nitride layers

Based on

4 Articles
2 Patents
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer

Properties

General physical and chemical properties

Property Value Source
photoluminescence dependent on annealing temperature

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Applications

Area Application Source
diagnostics

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Characterization

Method Source
photoluminescence

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
Product

silica/silicon nitride layers

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • p-Si
  • oxygen
Product

silica/silicon nitride layers

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • p-Si
  • oxygen
Product

silica/silicon nitride layers

References

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