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SixNy thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

SixNy
Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Source
capacitance density dependent on sweep cycle number

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Applications

Area Application Source
data storage

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Characterization

Method Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. qJ0cEQtjLfB98ZemJmT4DcOBmbBF12hXPS3e0
  2. 4qyP4hzWf7u3GlwWyNTj1rmXTaOKnvH
Product

SixNy thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. F9uT7GWbFOV94SrDcmaLL5OCe3EbdTBtZCntJ
  2. rynraq84cUOR8BJBKZN2J5JjbNLECfP
Product

SixNy thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. Vq4THVWgE6ZLkRCvalTJBumdFjwp7pwAgfjmy
  2. pgvVSqeRL7CeGFBsHbytYpHLdA4yP66
Product

SixNy thin film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • ammonia
  • octachlorotrisilane
  1. e9A4ypNZY0qHBjwBVnH5fYBSuAr4WbxYJp7qH
  2. yrwaQvC4LgA0pQ4IcqQ0rFlpg1RAcLA
Product

SixNy thin film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. A4IyyolmGhGhTfr0DF09PkLfR7gTRcxlkTYtc
  2. EWsns4jf1oSM2OxOZWXEWNW8t5yIGkN
Product

SixNy thin film

References

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