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SixNy thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

SixNy
Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Source
capacitance density dependent on sweep cycle number

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Applications

Area Application Source
data storage

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Characterization

Method Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. d7dA6Xj3kEBvSJJfzMRqdCh193K4PhYLKQWd8
  2. d1dGNLglCJftIAzWavupeE8pM4paMQ0
Product

SixNy thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. 3fa34L22rTce5a6FT31gVPxshOqNABiwnUBCd
  2. 4ZtzIccxgR4juUA7PY8PrP51qITYGee
Product

SixNy thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. sTGUZErN6ElrV7g64ogPPDohXMPty13WaNkvX
  2. XVdfHeWoLvdhXDkr6w2tnSjOKEwhAgL
Product

SixNy thin film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • ammonia
  • octachlorotrisilane
  1. pkbj07QKCj2RF7gCp1kuGWAkap45k9swdAt1D
  2. tNrs4xGBzMawlqYrqx4fr1lEoNXgfVI
Product

SixNy thin film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • octachlorotrisilane
  1. BmdYA5saX6hsumsg39V9DtNw5bQ08PkcgqNPc
  2. DMzsTYoXAndNTMQeFzYP7D4TqCATgN9
Product

SixNy thin film

References

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