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SiOxCyFz thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

fluorinated silica

SiOxCyFz
Type Complex Compound
Formula
Role raw materials
2

atomic hydrogen

hydrogen atom
Type Single Compound
Formula H
Role dopant

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • oxygen
  • carbon tetrafluoride
  • silicic acid tetraethyl ester
  1. EluioK3lOPRC2qhKVhqe9CrmzABrcX
Product

SiOxCyFz thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • carbon tetrafluoride
  • silicic acid tetraethyl ester
  • oxygen
  1. z2A9pNeDgKPinhl0VWrFt5oxy4HTXUEsg44RQWu
Product

SiOxCyFz thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • oxygen
  • carbon tetrafluoride
  • silicic acid tetraethyl ester
  1. sAt2RqIVqSjLOOIXaQcRFAeuKMqaj3
Product

SiOxCyFz thin film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicic acid tetraethyl ester
  • oxygen
  • carbon tetrafluoride
  1. T90kV4tlwPN0UiENL1RsEeBeeOL0N5XjVBwl9dc
Product

SiOxCyFz thin film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • carbon tetrafluoride
  • silicic acid tetraethyl ester
  • oxygen
  1. aFjhz0vptJsnL5frzCI839faGkvFvcOnEiIkeGr
Product

SiOxCyFz thin film

References

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