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ruthenium film on patterned silicon

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

ruthenium

Type Single Compound
Formula Ru
Role layer
2

ruthenium suboxide

ruthenium oxide
Type Single Compound
Formula RuO(x)
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

ruthenium film on patterned silicon

References

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