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HT-AlN layer

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

HT-AlN sublayer

Type Nano Material
Formula
Role raw materials
2

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • ammonia
  • trimethyl aluminum
  1. S4nE9FGjNTzGQwpm543vW
Product

HT-AlN layer

RMS roughness: 3.24 nm

Thickness: 55 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • ammonia
  • trimethyl aluminum
  1. As56XzANEZAQTUiIBCwI4
Product

HT-AlN layer

RMS roughness: 2.044 nm

Thickness: 55 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • ammonia
  • trimethyl aluminum
  1. gKz3g4Z4gFD8i24bJ8FAi
Product

HT-AlN layer

RMS roughness: 1.91 nm

Thickness: 55 nm

Medium: none

Support: silicon

References

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