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HT-AlN layer

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

HT-AlN sublayer

Type Nano Material
Formula
Role raw materials
2

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer

Properties

Applications

Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
  1. M6JPgthi6WcXEh93vXUGE
Product

HT-AlN layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
  1. j3rOy6ORPqRaOsWZ6Mxc2
Product

HT-AlN layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
  1. gFmPUUCaCPsvn3J3ikW3U
Product

HT-AlN layer

References

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