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SiN membrane precursor

Based on

1 Patents
2015 Most recent source

Composition

1

silicon nitride membrane

silicon nitride film SiN film
Type Nano Material
Formula
Role layer
2

stacked single-crystal silicon nanomembranes

silicon thin film silicon nanofilm silicon layer silicon film Si film Si NM
Type Nano Material
Formula
Role layer
3

silicon nitride membrane

silicon nitride film SiN film
Type Nano Material
Formula
Role layer
4

40 nm thick amorphous silicon layer

amorphous silicon film aSi film
Type Nano Material
Formula
Role layer
5

silicon dioxide film

silicon oxide layer silica layer silica film SiO2 film
Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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