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SiN membrane

Based on

1 Patents
2015 Most recent source

Composition

1

silicon nitride membrane

silicon nitride film SiN film
Type Nano Material
Formula
Role partial layer
2

stacked single-crystal silicon nanomembranes

silicon thin film silicon nanofilm silicon layer silicon film Si film Si NM
Type Nano Material
Formula
Role partial layer
3

SiN porous film

Type Nano Material
Formula
Role layer
4

porous nanocrystalline silicon film

pnc-Si film
Type Nano Material
Formula
Role layer

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Biological system Test details Source
bEnd3 cells

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

SiN membrane

References

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