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SiN membrane

Based on

1 Patents
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiN porous film

Type Nano Material
Formula
Role layer
2

SU-8 photoresist

SU-8
Type Polymer
Formula
Role partial layer

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Biological system Test details Source
bEnd3 cells

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

SiN membrane

Method 2

Type: Chemical synthesis
Source:
Starting materials
Product

SiN membrane

References

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