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tungsten thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

β-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Source
electrical resistivity dependent on synthesis parameter

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Applications

Characterization

Method Source
X-ray diffraction

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
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  2. DS7zsF
  3. oMIMDFa
  4. CkG0uWUVZpUzTczAa4JN4fms
Product

tungsten thin film

Method 2

Type: Physical formation
Source:
Starting materials
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  2. oxl9h1
  3. 0mVBWnJQ
  4. 2qnRIhNCNvG0K9QYIT2WfI5zp
Product

tungsten thin film

References

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