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ZrO2 film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

amorphous zirconium dioxide

zirconium(IV) oxide amorphous zirconia zirconium dioxide zirconia
Type Single Compound
Formula ZrO2
Role layer

Properties

General physical and chemical properties

Property Value Source
density

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Applications

Area Application Source
insulation

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. NRmeZxDlHQY6rjTNgJPBXInSu70IVbIciu1jZk
  2. rEZ7B
Product

ZrO2 film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. Z4JmaTctwqgJMyuNW1UYIK79dKzN5VZAhzhBJ8
  2. oJ8oeXD3EB0
Product

ZrO2 film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. 8QqVq9SVJBET0kNo2FV9LV3wiPpCnH8bxgiA5J
  2. 7h0qx
Product

ZrO2 film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. XefIDQCFLkaC4dRQYZtdjTcCmwXELwbwGiX86x
  2. xyrkL
Product

ZrO2 film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. j5rdh7ztIGJRYypZRcWRQDvMxmVymKgw3LhIFy
  2. RfhSF
Product

ZrO2 film

References

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