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ZrO2 film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

zirconium(IV) oxide

zirconium dioxide zirconia
Type Single Compound
Formula ZrO2
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

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Applications

Area Application Nanomaterial Variant Source
insulation

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. 6BYB4bkkW1P4dFzwTWFdEpyCnRaxrSv2pw7fbg
  2. GGRwF
Product

ZrO2 film

Roughness: ~ 1 nm

Thickness: ~ 1.2 nm

Thickness: ~ 2 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. 4vw42ovrtuWG6CUuaaYXtTaknvZtmtPYLZPc1c
  2. N5tZ1bAnPyA
Product

ZrO2 film

Roughness: ~ 2.8 nm

Thickness: ~ 102 nm

Thickness: ~ 2 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. NfTRJ7jQM9z4aT9024UR8TcmDtupi2xo0ZaBCh
  2. Wp9Ub
Product

ZrO2 film

Grain size: ~ 4 nm

RMS roughness: 0.3 nm

Roughness: ~ 1 nm

Thickness: 5 nm

Thickness: ~ 1.3 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. ohN6o0nU2yNERrqnDmddCjskV7wM7k6cmgVvGX
  2. qaYH4
Product

ZrO2 film

Roughness: ~ 4.6 nm

Thickness: ~ 100 nm

Thickness: ~ 2.4 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • water
  • tris(dimethylamido)(cyclopentadienyl)zirconium
  1. Z8Jhk4029vQHBghMEhd1QM1zD7v0ituJSgdesm
  2. oWZpB
Product

ZrO2 film

RMS roughness: 1.2 nm

Roughness: ~ 1.2 nm

Thickness: 10 nm

Thickness: ~ 1.5 nm

Medium: none

Support: silicon

References

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