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tungsten thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

α-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

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Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
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  3. SwT9dJV
  4. XbTGwQHb5VhoiwuVexJFRjixd
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 2.11 nm

Thickness: 270 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
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  2. ykcKdGtpRfWjJE9XKCyo
  3. bC2t4J
  4. P2dUhWS
  5. OGXCJPMNUtQIdGTFwHevLIjcI
Product

tungsten thin film

Cavity diameter: ~ 35 nm

Crystallite size: 12 - 40 nm

RMS roughness: 12.21 nm

Thickness: 250 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
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  2. 2UKcTk
  3. JrpjUMk
  4. leFAUispdyE5AF3XbL9cHzVD
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 2.67 nm

Thickness: 330 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
  1. xN0TutM9u8gr5IWWRO
  2. xCsOlF
  3. 2VYU6Js
  4. NlLKXJP17TTjMYfgRU0l7flz5
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 1.63 nm

Thickness: 230 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  1. WIIdWin6CXQ2DN1RKw
  2. 0fKRfLmdiblD7WikGSR
  3. JagQXa
  4. olU3RmD
  5. wnocrZPZ6e1GMdgbAnxtpSFvW
Product

tungsten thin film

Crystallite size: 12 - 40 nm

RMS roughness: 7.82 nm

Thickness: 50 nm

Thickness: 720 nm

Medium: none

Support: silicon

References

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