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floating gate structure

Based on

1 Articles
2015 Most recent source

Composition

1

tunnel oxide

Type Complex Compound
Formula
Role partial layer
2

NH3 plasma nitridation layer

PN layer
Type Nano Material
Formula
Role partial layer
3

lower polysilicon floating gate

Type Nano Material
Formula
Role partial layer
4

upper polysilicon floating gate

Type Nano Material
Formula
Role partial layer
5

NH3 plasma nitridation layer

PN layer
Type Nano Material
Formula
Role partial layer
6

shallow trench isolation

STI
Type Complex Compound
Formula
Role partial layer
7

silicon-oxide/silicon-nitride/ silicon-oxide

ONO
Type Nano Material
Formula
Role layer

Properties

Applications

Area Application Source
data storage

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Characterization

Method Source
atom probe field ion microscopy

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Biological effects

Preparation

References

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