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hafnium oxide-lanthanum oxide thin film on Si0.65Ge0.35

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials
2

lanthanum(III) oxide

lanthanum trioxide lanthanum oxide lanthania
Type Single Compound
Formula La2O3
Role raw materials

Properties

Applications

Characterization

Method Nanomaterial Variant Source
extended X-ray absorption fine structure

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
  1. v9fM9ePayKAPrxVcAINUVr8x
  2. x2G9SRW
Product

hafnium oxide-lanthanum oxide thin film on Si0.65Ge0.35

Thickness: ~ 30 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
  1. sQBPuM4xEpMGjltGKuCxeyNk
Product

hafnium oxide-lanthanum oxide thin film on Si0.65Ge0.35

Thickness: ~ 3 nm

Medium: none

Support: silicon germanium

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • La[N(TMS)2]3
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • water
See all (4)
  1. lwA4OaZRyKqzLoB
  2. XhqQC9EQkolmRkXfc4ywfEHuq
  3. kHHOMFBXmubDe3k8T5lfkmRaXL3J5AaWRd1o0va3ScVRuY43HYLZM6a38aSejNGs
Product

hafnium oxide-lanthanum oxide thin film on Si0.65Ge0.35

Thickness: ~ 3 nm

Medium: none

Support: silicon germanium

References

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