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hydrogenated silicon carbonitride film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hydrogenated silicon carbonitride

Type Single Compound
Formula Si40C33N25H(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
helium permeance

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Applications

Area Application Source
membranes

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Characterization

Method Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • 1,1,1,3,3,3-hexamethyldisilazane
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Product

hydrogenated silicon carbonitride film

References

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