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SiNx/phosphorus-doped polycrystalline silicon film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

phosphorus-doped polycrystalline silicon

Type Complex Compound
Formula
Role layer

Properties

Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
  1. yJ
Product

SiNx/phosphorus-doped polycrystalline silicon film

Method 2

Type: Physical formation
Source:
  1. AZ
Product

SiNx/phosphorus-doped polycrystalline silicon film

Method 3

Type: Physical formation
Source:
  1. en
Product

SiNx/phosphorus-doped polycrystalline silicon film

References

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