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SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

phosphorus-doped polycrystalline silicon

Type Complex Compound
Formula
Role layer
3

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
charge carrier density

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
optical microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
  1. V8OsXeqn
  2. O5mFk
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: ~ 2.5 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 2

Type: Physical formation
Source:
  1. WRLJQX4n
  2. RnSKu
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 3

Type: Physical formation
Source:
  1. Yyqrr2Y7
  2. HW8cy
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 2.62 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 4

Type: Physical formation
Source:
  1. DKsSqUld
  2. 23Yux
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 1.6 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 5

Type: Physical formation
Source:
  1. 9IskTXUy
  2. 5EfSh
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 1.6 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

References

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