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aluminum nitride/carbon nitride film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous carbon nitride

carbon nitrides carbon nitride a-CNx CNx CN
Type Single Compound
Formula CN(x)
Role layer
2

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Characterization

Method Nanomaterial Variant Source
atomic emission spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. j9A3UUq
Product

aluminum nitride/carbon nitride film

RMS roughness: 2.28 - 2.52 nm

Thickness: 70 - 100 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon substrate

References

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