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amorphous N-doped ZrO2 layer

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous zirconium dioxide

zirconium(IV) oxide amorphous zirconia zirconium dioxide zirconia
Type Single Compound
Formula ZrO2
Role raw materials
2

atomic nitrogen

nitrogen atom
Type Single Compound
Formula N
Role dopant

Properties

General physical and chemical properties

Property Value Source
capacitance equivalent thickness

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Applications

Area Application Source
electronics

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Characterization

Method Source
grazing incidence X-ray and neutron diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. JEVpeMKPdYOHrAmRW
Product

amorphous N-doped ZrO2 layer

Method 2

Type: Physical formation
Source:
Starting materials
  1. OHyXMmlkuNKmq4QmL5QObABQvDb8naseeoKwCH2
Product

amorphous N-doped ZrO2 layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. baiiGmEQY2md7bucT
Product

amorphous N-doped ZrO2 layer

Method 4

Type: Physical formation
Source:
Starting materials
  1. FY1Dr7ACDn7wMf4Y1eO8d2avGbwe7u7UNErXoEw
Product

amorphous N-doped ZrO2 layer

References

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