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TiMoN/Si3N4 nano-multilayer film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

TiMoN/Si3N4 nano layers

Type Nano Material
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
friction coefficient

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Applications

Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Si wafer
  • titanium
See all (4)
  1. hPi2EB
Product

TiMoN/Si3N4 nano-multilayer film

Roughness: 13.2 nm

Thickness: 2570 nm

Medium: none

Support: Si wafer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Si wafer
  • titanium
See all (4)
  1. nPdcNQ
Product

TiMoN/Si3N4 nano-multilayer film

Roughness: 21.3 nm

Thickness: 2830 nm

Medium: none

Support: Si wafer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Si wafer
  • titanium
See all (4)
  1. jmqNMZ
Product

TiMoN/Si3N4 nano-multilayer film

Roughness: 10.4 nm

Thickness: 2260 nm

Medium: none

Support: Si wafer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Si wafer
  • titanium
See all (4)
  1. KeLN2R
Product

TiMoN/Si3N4 nano-multilayer film

Roughness: 11.4 nm

Thickness: 2470 nm

Medium: none

Support: Si wafer

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Si wafer
  • titanium
See all (4)
  1. aop1uG
Product

TiMoN/Si3N4 nano-multilayer film

Roughness: 40.1 nm

Thickness: 3110 nm

Medium: none

Support: Si wafer

References

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