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Al/CNx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous carbon nitride

carbon nitrides carbon nitride a-CNx CNx CN
Type Single Compound
Formula CN(x)
Role layer
2

aluminium

aluminum
Type Single Compound
Formula Al
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Characterization

Method Nanomaterial Variant Source
atomic emission spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. HwguIwW
Product

Al/CNx film

RMS roughness: 1.46 - 1.54 nm

Thickness: 70 - 100 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon substrate

References

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