Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

SiNx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride membrane

SiNx film
Type Nano Material
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
water vapor transition rate

More information available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
coatings

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

More information available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. Z6DARMdFaZHku
Product

SiNx film

Roughness: ~ 25.9 nm

Thickness: 100 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. avOgSkdbvIeFG
Product

SiNx film

Roughness: ~ 26 nm

Thickness: 150 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. 1eEhwki6WOW5J
Product

SiNx film

Roughness: ~ 26.9 nm

Thickness: 200 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. J7zcQtyyefaiC
Product

SiNx film

Roughness: ~ 19.2 nm

Thickness: 100 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. kdAgEsOUXo7Fx
Product

SiNx film

Roughness: ~ 20 nm

Thickness: 150 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial