Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

Si-rich SiNx/SiNx film

Based on

1 Articles
2015 Most recent source

Composition

1

Si1.4N

Type Single Compound
Formula Si1.4N
Role layer
2

Si0.8N

Type Single Compound
Formula Si0.8N
Role layer
3

atomic hydrogen

hydrogen atom
Type Single Compound
Formula H
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

More information available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
power generation

More information available to subscribers only.

Or, view sample content

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. tJ2lqF1f2DDdRcZZxBtF
Product

Si-rich SiNx/SiNx film

Thickness: 10 nm

Thickness: 100 nm

Medium: none

Support: crystalline silicon

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial