Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

Si-rich SiNx/SiNx film

Based on

1 Articles
2015 Most recent source

Composition

1

Si2N

Type Single Compound
Formula Si2N
Role layer
2

Si0.8N

Type Single Compound
Formula Si0.8N
Role layer
3

atomic hydrogen

hydrogen atom
Type Single Compound
Formula H
Role dopant

Properties

General physical and chemical properties

Property Value Source

Full content is available to subscribers only

To view content please choose from the following:

Applications

Area Application Source

Full content is available to subscribers only

To view content please choose from the following:

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. iLfrp7ssbY6HGIE1x3tQ
Product

Si-rich SiNx/SiNx film

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial