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HfCx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

HfCx

Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
compressive stress

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Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • methane
  • hafnium
  1. LSnn2Gpn1jOaBlnAG
  2. 8yWBn
  3. mlWV1VufRb48dtzNemIVl76ORYv2K4wymmxt96Z
  4. sbKlTc
Product

HfCx film

RMS roughness: 5.62 nm

Medium/Support: none

References

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