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GeOxNy/HfO2 on Sb-doped Ge

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

GeOxNy

Type Complex Compound
Formula
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance dependent on frequency

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Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. EOb
  2. SMnfHoDKt1GCDo1F
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 7 nm

Medium: none

Support: Sb-doped Ge

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. X3C
  2. crYPmNFffhYHdPoq
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 10 nm

Medium: none

Support: Sb-doped Ge

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. AnD
  2. vBfCWCQh2XFOoYur
Product

GeOxNy/HfO2 on Sb-doped Ge

RMS roughness: 0.29 nm

Thickness: 3 nm

Medium: none

Support: Sb-doped Ge

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. 3r3
  2. GqOu69tSrIYL6cJu
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 5 nm

Medium: none

Support: Sb-doped Ge

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. K9a
  2. imUnsZQKydNs3mJU
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 1 nm

Thickness: ~ 0.27 nm

Medium: none

Support: Sb-doped Ge

References

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