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masked nanopillars

Based on

2 Patents
2010 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role core
2

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer

Properties

Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. kdOLVMQPKgrbVu1vML3mLJZ4IraQQsr1AY
Product

masked nanopillars

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. FJsoZteEXg4Cr8eZmmAlIyPkcDrVn46FhX
Product

masked nanopillars

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon
  1. q9279E6qjV9yPnaSIV4
Product

masked nanopillars

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon
  1. ekgWDpcM4qHfXmKjIfN
Product

masked nanopillars

References

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