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tantalum nitride thin film

Based on

2 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role raw materials

Properties

General physical and chemical properties

Property Value Source
electric current

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Applications

Area Application Source
data storage

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • ammonia
  1. nWEww
Product

tantalum nitride thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • ammonia
  1. 07uFN
Product

tantalum nitride thin film

References

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