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TaN thin film

Based on

3 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula NTa
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electric current

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • ammonia
  1. 1UCuy
Product

TaN thin film

Thickness: 27 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • tantalum(III) nitride
Product

TaN thin film

Thickness: 4 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • ammonia
  1. pQMpo
Product

TaN thin film

Thickness: 54 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • tantalum(III) nitride
Product

TaN thin film

Thickness: 2 nm

Medium/Support: none

References

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