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Pt/Ta/SiO2 film on SiN-coated Si

Based on

3 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

platinum

Type Single Compound
Formula Pt
Role layer

Properties

General physical and chemical properties

Property Value Source
resistivity dependent on platinum layer thickness

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • tantalum
  • silicon nitride/silicon
  1. dC3Es5IBwvvctTKCBJHqFaa
Product

Pt/Ta/SiO2 film on SiN-coated Si

Method 2

Type: Physical formation
Source:
Starting materials
  • tantalum
  • silicon nitride/silicon
  1. T5YdyXpxLwd0bKadlndqyaS
Product

Pt/Ta/SiO2 film on SiN-coated Si

Method 3

Type: Physical formation
Source:
Starting materials
  • tantalum
  • carborundum/silicon
  1. ohJprO82dFVHJM06j0jWFGE
Product

Pt/Ta/SiO2 film on SiN-coated Si

Method 4

Type: Physical formation
Source:
Starting materials
  • tantalum
  • carborundum/silicon
  1. 2MwBjDui8UOW1WlL1AutVGe
Product

Pt/Ta/SiO2 film on SiN-coated Si

Method 5

Type: Physical formation
Source:
Starting materials
  • tantalum
  • Si wafer
Product

Pt/Ta/SiO2 film on SiN-coated Si

References

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