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SiNx layer

Based on

5 Articles
1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. 5X3OJXi35NF29CZwZBIR1TAS2G3XdkmjVn
  2. fCBcutprEB
  3. 24s7
Product

SiNx layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • crystalline silicon
  • nitrogen
  1. bcYH6
  2. xdBU7fD
Product

SiNx layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon hydride
  • nitrogen
  1. i9Lbga17IjRmiMn4KW4dG1tt6suTIDWqzE
  2. mXIUzIWcUO
  3. xqAhE
Product

SiNx layer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon hydride
  • nitrogen
  1. u784IO3v7HyNfCmOingaMw0NEsmW8dxmTL
  2. DaWZoVdnRq
  3. jZxw9
Product

SiNx layer

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  • crystalline silicon
  1. 1rjIPpT
Product

SiNx layer

References

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