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SiNx layer

Based on

5 Articles
1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
photoluminescence

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Applications

Area Application Source
electronics

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Characterization

Method Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. 8uFnl9FlT3DwRQVnDNXNp41SvBiD39I6CB
  2. tRxbryvc3F
  3. h5q8
Product

SiNx layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • crystalline silicon
  • nitrogen
  1. 7X4rQ
  2. 24ndO7o
Product

SiNx layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon hydride
  • nitrogen
  1. rACdtXUJ5WM5mqnbuCsohLd62fzk02IHQ3
  2. nZYmhenpcS
  3. TBCoC
Product

SiNx layer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon hydride
  • nitrogen
  1. cDxsLnoRh1o0m9hQkyAw2IZBCNgzpmxnPs
  2. riJlIs4Mw3
  3. qgTPn
Product

SiNx layer

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  • crystalline silicon
  1. Zg0ii5h
Product

SiNx layer

References

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