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aluminium nitride film

Based on

3 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride AlN
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Source
hardness

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Applications

Area Application Source
raw materials/precursors/templates

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Characterization

Method Source
selected area electron diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • aluminium nitride
  • gallium(III) arsenide
Product

aluminium nitride film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. NUIrdLhe9yAPRKw7H4Sss0E7jvTlPBwav9oEysSVfGOVy8Bo8tqrAXcmFc3v6KubxfSPF7xcISdjTaniedPg
  2. 9OngLgqIJgRl5FWUH1M
  3. 2vnNrBUNPbi0uMzfMZM
  4. potAfCuUNKrj0oWUctK3BrrdiVg95t40EgHhNincnfLuf
  5. 4TzWwPKQYmkflkakFL38itcdGWM
Product

aluminium nitride film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. GcMVmyScx3RabhyUaHsRNkz0Q5o8nuUQ1kpFugn9IEk9UfqtqCLXRpE5NQJgVwSGIFucnBVeFOpD3IX8WgOP
  2. Sz02s3nDxIPUAvcF4MR
  3. HfIrpLUvgrGFCbA7Ugh
  4. SO8k1obFBCibbQFqNMzkmFOp1PymuONDLrEmUGMuwcbuJ
  5. hotHjr16R19rJJisOGnI91WYOiyCr
Product

aluminium nitride film

References

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