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HfO2/TiN layer

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

titanium nitride

Type Single Compound
Formula TiN
Role layer
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • TiN/Ti/Si stack
  • bis(methylcyclopentadienyl)methoxymethyl hafnium(IV)
  • water
Product

HfO2/TiN layer

Grain lateral size: ~ 40 nm

Thickness: 10 nm

Thickness: 3 nm

Thickness: 40 nm

Medium: none

Support: n-doped silicon

References

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