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Au/HfO2/TiN metal-insulator-metal capacitor

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium nitride

Type Single Compound
Formula TiN
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
3

gold

Type Single Compound
Formula Au
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance dependent on temperature

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  • titanium nitride
  1. IPYLqg
  2. DbLzPn
Product

Au/HfO2/TiN metal-insulator-metal capacitor

Thickness: 10 nm

Medium/Support: none

References

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