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nanoporous Pd thin film on silicon substrate

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon dioxide

amorphous silicic oxide amorphous silica
Type Single Compound
Formula SiO2
Role layer
2

silicon nitride

a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
3

tantalum

Type Single Compound
Formula Ta
Role layer
4

palladium

Type Single Compound
Formula Pd
Role layer

Properties

General physical and chemical properties

Property Value Source
average in-plane stress

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
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  3. 23I
  4. CfIY7BsGgGHR3GeLUQoDjeLE0xaAwmkAqMzHe
Product

nanoporous Pd thin film on silicon substrate

Method 2

Type: Chemical synthesis
Source:
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  2. S6JyH3JPAmnktvpnyWZcT8eT
  3. 0mQ
  4. GZhwLCxVhzOtMwkC0RsOXItXvESK7d9wxudba
Product

nanoporous Pd thin film on silicon substrate

Method 3

Type: Chemical synthesis
Source:
  1. WIJbHUCs9lQWm0zy
  2. rtM8KhAQSZE8MInzQRTEhAtk
  3. gjc8E
  4. UktRjR1Ol7PmNFje9UrKrInkXc1fRVQGE7nfz
Product

nanoporous Pd thin film on silicon substrate

Method 4

Type: Chemical synthesis
Source:
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  2. YWTJAgT8K2FiJdyEXCbsAIca
  3. x0A
  4. t0wI5KBaCn7jkMvlBQUoNMKwbwy8LvL6R6yUs
Product

nanoporous Pd thin film on silicon substrate

References

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