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nanoporous Pd thin film on silicon substrate

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon dioxide

amorphous silicic oxide amorphous silica
Type Single Compound
Formula SiO2
Role layer
2

amorphous silicon nitride

silicon nitride a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
3

tantalum

Type Single Compound
Formula Ta
Role layer
4

palladium

Type Single Compound
Formula Pd
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
average in-plane stress

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Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. NzxHg8Z6skZOVrFT
  2. bffIOuOgQfL14FG2eCY4Gzhh
  3. Jvz
  4. EFifUXo92ErxrWcPtWeRjAfPzQiXoPk5nI9IP
Product

nanoporous Pd thin film on silicon substrate

Pore size: 5 - 7 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 2

Type: Chemical synthesis
Source:
  1. TVL5wxrxa5ch3Y5z
  2. 8ZHS5iuK39aYgVbQ00RUI8HY
  3. k4J
  4. 8vMb9lL6oKWzb9u0MFVfXbLoY516KnBvaNDS0
Product

nanoporous Pd thin film on silicon substrate

Crack size: 10 - 50 nm

Pore size: ~ 10 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 3

Type: Chemical synthesis
Source:
  1. tknlNTu07SmEQXEG
  2. 2Pbc3hnPPbYKQyL8EkYn8usJ
  3. D78vS
  4. b5oa6KVoNBBYLHrkrjErXxjARGp9OT9eWzpv2
Product

nanoporous Pd thin film on silicon substrate

Pore size: 5 - 7 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 4

Type: Chemical synthesis
Source:
  1. 60KWXdVposEn82UT
  2. QC6q7VXTlXnoVDrG4nLYDfvJ
  3. tKb
  4. XvqoDlKsxXzkiZynvb3bOQiX4FRWvsVxNY9ra
Product

nanoporous Pd thin film on silicon substrate

Crack size: 10 - 50 nm

Pore size: ~ 10 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

References

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