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nanoporous Pd thin film on silicon substrate

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon dioxide

amorphous silicic oxide amorphous silica
Type Single Compound
Formula SiO2
Role layer
2

silicon nitride

a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
3

tantalum

Type Single Compound
Formula Ta
Role layer
4

palladium

Type Single Compound
Formula Pd
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
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  2. p33REdBJ1L1qb9G4zHHIL3bo
  3. JUU
  4. qpGX47XIOKUNNcMvPyrpZH67NcblpqSjqNsJO
Product

nanoporous Pd thin film on silicon substrate

Method 2

Type: Chemical synthesis
Source:
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  2. l3img4DNXRLTaSH8NrOSdY4a
  3. bgC
  4. cVTlrJ9t9xmh1V63AB0pibd0UDepOBnsyopAM
Product

nanoporous Pd thin film on silicon substrate

Method 3

Type: Chemical synthesis
Source:
  1. HK0ziJlrJ3tsICqG
  2. XBeF3QeIktXN5CyqQtK9s2qq
  3. ZHdTK
  4. ToUgkqAJdbYxz4mMSDPu2awYv6CCYXTmPteg7
Product

nanoporous Pd thin film on silicon substrate

Method 4

Type: Chemical synthesis
Source:
  1. h86cM5coIlfrsrQp
  2. G8hJNZfcFFbSsX6XgImpHjge
  3. MJ0
  4. L5pHe5ebIK4jBle0Bz9eLVhE2Y2EpXeatYDFh
Product

nanoporous Pd thin film on silicon substrate

References

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