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n-Si/SiO2/TaN(x)/Cu

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

n-type silicon

n-Si
Type Complex Compound
Formula
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

tantalum subnitride

ditantalum nitride tantalum nitride Ta2N
Type Single Compound
Formula Ta2N
Role layer
4

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Source
flat-band voltage dependent on gate bias

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Applications

Area Application Source
electronics

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • n-type silicon
  • oxygen
  1. xE22xDh
  2. UunJJ181A45ZQ
Product

n-Si/SiO2/TaN(x)/Cu

References

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