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Al2O3/HfO2/SiO2/Si stacks

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role raw materials
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
3

blocking oxide layer

blocking oxide layer Al2O3 layer Al2O3 film BO layer
Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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