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silicon rich nitride/amorphous silicon superlattice structure

Based on

1 Articles
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon rich nitride/amorphous silicon bilayer

SRN/a-Si bilayer
Type Nano Material
Formula
Role layer
2

silicon-rich nitride

silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role layer
3

amorphous silicon nanoparticles

Type Nano Material
Formula
Role fillers

Properties

Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  1. OfAyAyBIBVH7
Product

silicon rich nitride/amorphous silicon superlattice structure

References

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