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multilayer Si-C-N hard and soft coating

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

reacted silicon substrate

Type Complex Compound
Formula
Role layer
2

Si-C-N

Type Complex Compound
Formula
Role layer
3

Si-C-N

Type Complex Compound
Formula
Role layer
4

Si-C-N

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Source
fracture toughness

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Applications

Area Application Source
coatings

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • silicon carbide
  • nitrogen
  1. D0MbH
  2. LtgeSl
  3. Vr4DLtp141fqiO5KrJ8W1IoQp
  4. SQKg
Product

multilayer Si-C-N hard and soft coating

References

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