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HfZrO2/SiO2 film

Based on

1 Articles
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium zirconate

Type Single Compound
Formula HfZrO2
Role layer

Properties

Applications

Characterization

Method Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • water
  • p-doped silicon
  1. xVm5O2
Product

HfZrO2/SiO2 film

References

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