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nanopatterned Si wafer

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role partial layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
neutron reflectivity dependent on environmental conditions

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Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  1. UsBYgNU8MXVqWVbIvwVnjEqxmOTFS
Product

nanopatterned Si wafer

Hole depth: 100.4 - 115.8 nm

Hole width: 590 nm

Interhole spacing: 188 nm

Roughness: 0.70 - 1.64 nm

Thickness: 3.1 - 3.92 nm

Medium/Support: none

References

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