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example of semiconductor-supported dielectric film/sesquisiloxane-coated nanoparticle-embedded cured photoresist array bilayer

Based on

1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
2

example of polysiloxane-coated nanoparticle monolayer-embedded cured photoresist layer

Type Nano Material
Formula
Role partial layer

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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