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copper CF4 plasma-treated SiOx/platinum structure

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role raw materials
2

atomic fluorine

fluorine atom
Type Single Compound
Formula F
Role dopant
3

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
device resistance dependent on high resistance state

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Applications

Area Application Nanomaterial Variant Source
data storage

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Characterization

Method Nanomaterial Variant Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon oxide
  • platinum
  1. Zd5vLtI82DZK7
  2. A2tagzMj1R1SiCZxi8BEocH
  3. waDXxMaSES5dVvRy
Product

copper CF4 plasma-treated SiOx/platinum structure

Thickness: 20 nm

Thickness: 200 nm

Medium: none

Support: platinum

References

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