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copper CF4 plasma-treated SiOx/platinum structure

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich silicon oxide

SiOx SRSO
Type Single Compound
Formula SiO(x)
Role raw materials
2

atomic fluorine

fluorine atom
Type Single Compound
Formula F
Role dopant
3

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Source
device resistance dependent on high resistance state

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Applications

Area Application Source
data storage

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Characterization

Method Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon oxide
  • platinum
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Product

copper CF4 plasma-treated SiOx/platinum structure

References

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