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aluminum/silicon nitride/hydrogenated amorphous silicon film deposited on indium tin oxide-coated glass

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hydrogenated amorphous silicon

a-Si:H
Type Complex Compound
Formula
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
3

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • indium tin oxide glass
  • silicon hydride
  1. H8Wf09j6AuL0T2afQnPPOM
  2. aPHq0807wG75b
  3. Der3wEuHVPdgD0sccTGOQEH
Product

aluminum/silicon nitride/hydrogenated amorphous silicon film deposited on indium tin oxide-coated glass

References

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