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As-implanted SiO2/Si/SiO2 multilayer

Based on

1 Articles
2012 Most recent source

Composition

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

arsenic

Type Single Compound
Formula As
Role dopant
3

silicon

Type Single Compound
Formula Si
Role layer
4

arsenic

Type Single Compound
Formula As
Role dopant
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
6

arsenic

Type Single Compound
Formula As
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
spreading resistance profile

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Applications

Characterization

Biological effects

Preparation

References

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