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SRN/Si3N4 multilayer nanostructure

Based on

1 Articles
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
2

silicon-rich nitride

silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • n-doped silicon
  • nitrogen
  1. RU7N4
  2. iiGG9Ur3Y8laCJs3qFLRQTAG1xC7CcKvFClck
Product

SRN/Si3N4 multilayer nanostructure

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • quartz
  • nitrogen
  1. Myqtj
  2. MZbv29iP92OU3RaytfXrIg6wcJsULvNc06c7d
Product

SRN/Si3N4 multilayer nanostructure

References

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