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HfO2/amorphous indium gallium zinc oxide film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
2

amorphous indium gallium zinc oxide

a-IGZO
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. EjvEf14oeCzLMafjRGZKSsdpJvXKUFY
  2. 0A7hVcMAabFulOP36HZErmFcuDVH4
Product

HfO2/amorphous indium gallium zinc oxide film

Method 2

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. 6pfvsseRGmTlEXhcjvpZB6nPn5rEaib
  2. ZYBypu4axtUuzltZaaykCaIrtscxI
Product

HfO2/amorphous indium gallium zinc oxide film

Method 3

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. mD4If5HKJCra0mYkYEK5DqIPDsfqiiY
  2. iNZ9XuV4PSpRq995N9QX17PlUI2pJ
Product

HfO2/amorphous indium gallium zinc oxide film

Method 4

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. oP0nfneNESTbn8GQLuhmoElsGGsoSbN
  2. 2Cz1UYExbU8rvFAubnNRJTfayRb7O
Product

HfO2/amorphous indium gallium zinc oxide film

References

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