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HfO2/amorphous indium gallium zinc oxide film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
2

amorphous indium gallium zinc oxide

a-IGZO
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. Fj3Vjb9HT3FlcHstWOQSBGkSTkrzFq3
  2. nxunaVhtA1AY8wpHoMKJA7giVfh3h
Product

HfO2/amorphous indium gallium zinc oxide film

RMS roughness: 0.510 nm

Thickness: 100 nm

Thickness: 30 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. QTZyAn02k8efA0H4ocxhdfBkyE8zl4K
  2. xFg09JxsVnKkFbk8Qep1CMvpGfaGC
Product

HfO2/amorphous indium gallium zinc oxide film

RMS roughness: 0.579 nm

Thickness: 100 nm

Thickness: 30 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. aCK0dP9ZPzoyeLOk3HbNrgpUUHp9sin
  2. U0kYmPIcMj5iNdoCCYWbUfLtnwPo2
Product

HfO2/amorphous indium gallium zinc oxide film

RMS roughness: 1.179 nm

Thickness: 100 nm

Thickness: 30 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. ubBJXqoSPubpY5WT8RA7lmDOFRc4PEp
  2. 5rIoxZhcWKlb48FNmD4cpjNNyhuyW
Product

HfO2/amorphous indium gallium zinc oxide film

RMS roughness: 0.513 nm

Thickness: 100 nm

Thickness: 30 nm

Medium/Support: none

References

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